JPH0192128U - - Google Patents
Info
- Publication number
- JPH0192128U JPH0192128U JP18693887U JP18693887U JPH0192128U JP H0192128 U JPH0192128 U JP H0192128U JP 18693887 U JP18693887 U JP 18693887U JP 18693887 U JP18693887 U JP 18693887U JP H0192128 U JPH0192128 U JP H0192128U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- furnace
- diffusion
- introduces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18693887U JPH0192128U (en]) | 1987-12-08 | 1987-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18693887U JPH0192128U (en]) | 1987-12-08 | 1987-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192128U true JPH0192128U (en]) | 1989-06-16 |
Family
ID=31478133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18693887U Pending JPH0192128U (en]) | 1987-12-08 | 1987-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192128U (en]) |
-
1987
- 1987-12-08 JP JP18693887U patent/JPH0192128U/ja active Pending